Stabilization of molybdenum in CMP: Operando insights into distinct inhibitor adsorption pathways

Authors

Seung-Hoon Choi,

Dong Un Lee,

Melissa E. Kreider,

Adam C. Nielander,

Michaela Burke Stevens,

Donggeun Park,

Ilhwa Hong,

Ki-Hyun Park,

Kiho Bae,

Hoyoung Kim,

Bo Un Yoon,

Sun Jung Kim,

Thomas F. Jaramillo,

Kangchun Lee

Year of publication

2025

Journal

Journal of Electroanalytical Chemistry

Volume

996

Starting page

119377

ISSN

1572-6657

DOI

doi.org/10.1016/j.jelechem.2025.119377

Research Areas

Adsorbate-adsorbate interactions,

Funding sources

SUNCAT People

Dong Un (Daniel) Lee,

Melissa Kreider,

Adam Nielander,

Michaela Stevens,

Thomas Francisco Jaramillo